Multilayered Composite Membranes Based on Layer‐by‐Layer Stacked Graphene Films for Ultraviolet Pellicle Applications (Adv. Funct. Mater. 4/2026)

Advanced Functional Materials 2026 Open access

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Authors: Jaegun Sim, Dong Jin Kim, Eun-Jung Kim, Jooyoung Yoon, Sungjin Hong, Hwigwon Jeon, So Hee Kim, Nam‐Hoon Goo, Yun Sung Woo, Byung Hee Hong
DOI: 10.1002/adfm.73581
Cited by: 0

Abstract

Stacked Graphene Films The diagram illustrates the use of a pellicle made from a multilayer composite film, composed of layer-by-layer stacked graphene, for extreme ultraviolet (EUV) lithography. This graphene-based pellicle offers excellent optical transparency, mechanical strength, and thermal stability, ensuring superior protection for the photomask during EUV exposure and minimizing degradation or contamination. More information can be found in the Research Article by Yun Sung Woo, Byung Hee Hong, and co-workers (10.1002/adfm.202518685).

Fields of Study & Subjects

Advancements in Photolithography Techniques Graphene research and applications 2D Materials and Applications

Publication details

Journal / source
Advanced Functional Materials
Volume
36
Issue
4
Publication date
1 January 2026
Language
EN