Geometry‐Programmable Light‐Driven Silicon Microrobots

Light-driven micro/nanorobots (LMNRs) offer on-demand propulsion governed by light direction, wavelength, and polarization, yet their architectures and navigation behaviors have been constrained by limited fabrication strategies. Here, we present a general and scalable strategy for geometry-programmable silicon LMNRs based on plasma-enhanced chemical vapor deposition. This approach yields libraries of silicon microrobots with deterministically tailored 0D, 1D, 2D, and 3D geometries, greatly expanding the accessible design space. Under visible and near-infrared illumination, the LMNRs exhibit efficient propulsion and precise, light-programmable trajectories, with guidance further augmented by magnetic steering. Surface functionalization with bacteriophages imparts species-selective bacterial capture, enabling targeted biointeractions. By integrating structural programmability, multimodal actuation, and bioselective interfaces in a silicon platform, this work establishes a versatile foundation for multifunctional LMNRs, paving the way for micro/nanorobotic applications in precision therapy, environmental monitoring, and micro/nano-manufacturing.