Optical and Magnetic Field Modulated CrGeTe 3 /Co 3 Sn 2 S 2 Nanofilm Covered Metamaterial by Sub‐Pixel Micro‐Scanning 3D‐Printed at Room‐Temperature Toward 6G Applications

ABSTRACT Terahertz technology is a fundamental component of sixth generation systems, contributing to enhanced data rates, ultra‐dense connectivity, and low‐latency communication. This has led to an increased demand for the advancement of high‐performance terahertz detection and modulation devices. This study involves the fabrication of 3D microstructures utilizing sub‐pixel micro‐scanning 3D printing technology, coupled with magnetron sputtering to deposit CrGeTe 3 /Co 3 Sn 2 S 2 nanofilms onto their surfaces, thereby creating a heterojunction. The design leverages the properties of Weyl semimetal and ferromagnetic semiconductor, enhancing light‐matter interaction through the local surface plasmon effect inherent in the 3D microstructures, and enabling dynamic modulation through the application of external laser and magnetic fields. Performance evaluations of the device at 0.1 THz revealed a responsivity of 45.21 A/W under magnetic field modulation, with a noise equivalent power as low as 11.15 pW/Hz 1/2 ; additionally, under laser modulation, a modulation depth of 48.6% is achieved. Notably, the device operates effectively at room temperature withoutlow‐temperature maintenance. This research present a solution for terahertz devices developmentand underscore applications of Weyl semimetal‐metamaterial heterostructures in terahertz detection and modulation.