Enhancement of Circular Dichroism in Chiral Dielectric Metasurfaces by Ion Beam Irradiation

ABSTRACT Resonant chiral dielectric metasurfaces can support circular dichroism exceeding that of natural materials, but their small dissipative losses simultaneously limit the maximization of circular dichroism, which inherently relies on absorption. Importantly, while the condition for optimal circular dichroism in resonant structures can be rigorously formulated based on the concept of critical coupling, controlling the amount of absorption experimentally, and ideally tuning it to the optimal value post‐fabrication, remains elusive. Here, we experimentally tailor the dissipative losses of chiral bilayer dielectric metasurfaces post‐fabrication using energetic ion beam irradiation. Specifically, we study the transmission characteristics of 4 ‐symmetric chiral metasurface consisting of silicon nanocuboid arrays embedded in silica glass using polarization‐resolved spectroscopy. We enhance the circular dichroism from 0.70 in the pristine, unirradiated metasurface to 0.85 after irradiation. Our experimental results are complemented by numerical simulations allowing us to retrieve the refractive index changes induced by the ion beam irradiation in the constituent materials of the metasurface. Our work offers a new approach to globally maximize optical chirality in engineered nanostructures, paving the way toward chiral emission and advanced polarization control applications.