A Strain Decoupling Packaging Strategy for High‐Fidelity Ultrathin Silicon Shape Sensors for Soft Medical Robotics
Abstract
Reliable soft sensors are essential for precise control, real-time feedback, and safe operation in soft medical robots. Ultrathin silicon piezoresistive sensors offer flexibility, durability, and high sensitivity, but protecting them from external stress while maintaining softness remains challenging. Existing packaging strategies often compromise flexibility and induce excessive strain, leading to device failure. Here, we introduce an oil-lubricated slidable packaging approach that enables high-fidelity shape sensing of ultrathin silicon gauges by mechanically isolating the sensing element within a dual-layer film. This design decouples the sensor from the packaging, minimizing bending strain on the sensing element. Experimental results show that the sensor maintains stable and reliable signals under large applied strains, with fast response (
Fields of Study & Subjects
Advanced Sensor and Energy Harvesting Materials
Soft Robotics and Applications
Advanced Materials and Mechanics
Publication details
- Journal / source
- Advanced Science
- Publisher
- Wiley
- Volume
- 13
- Issue
- 22
- Pages
- e18733–e18733
- Publication date
- 26 February 2026
- Language
- EN