Tri‐Layer Solid‐State Nanopore Arrays with Crosstalk Suppression for High‐Throughput, Femtomolar‐Level Biosensing
Abstract
ABSTRACT Solid‐state nanopore arrays are emerging as powerful tools for label‐free, ultrasensitive biosensing, yet their implementation has been constrained by inter‐pore crosstalk and limited fabrication uniformity. A multilayer Al 2 O 3 /Au/Si 3 N 4 nanopore architecture, produced via helium ion beam lithography, is introduced to address these limitations through structural and materials‐level innovation. Finite‐element analysis identifies a critical inter‐pore spacing approximately 20 times the pore radius as necessary to minimize electric field coupling, enabling rational array design. The membrane structure incorporates a dielectric Al 2 O 3 layer for electrical isolation and an intermediate gold layer for site‐specific aptamer immobilization, confining molecular recognition to the nanopore interior. Arrays with ∼30 nm pores and
Fields of Study & Subjects
Nanopore and Nanochannel Transport Studies
Anodic Oxide Films and Nanostructures
Nanoporous metals and alloys
Publication details
- Journal / source
- Advanced Science
- Publisher
- Wiley
- Volume
- 13
- Issue
- 20
- Pages
- e74213–e74213
- Publication date
- 4 February 2026
- Language
- EN