Programming Strategies in AFM Lithography: Effects on Mask Oxidation in Silicon Nanowire Transistor Fabrication

SpringerBriefs in applied sciences and technology 2026 Book chapter

View at publisher
Authors: Ahmad Makarimi Abdullah, Khatijah Aisha Yaacob, M. A. B. Mohd Azmi, Asrulnizam Abd Manaf
DOI: 10.1007/978-3-032-08840-6_15
Cited by: 0
References: 16

Fields of Study & Subjects

Force Microscopy Techniques and Applications Advanced Surface Polishing Techniques Molecular Junctions and Nanostructures

Publication details

Journal / source
SpringerBriefs in applied sciences and technology
Pages
125–133
Publication date
1 January 2026
Language
EN
Document type
Book chapter