Design and Fabrication of Simulation-Optimized Polysilicon Microhemispherical Shell Resonators with Self-aligned Curved Electrodes

Mechanisms and machine science 2026

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Authors: Baoyin Hou, Lufeng Che

DOI: 10.1007/978-3-032-11791-5_21

Cited by: 0

References: 16

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators Acoustic Wave Resonator Technologies

References 16