High-Performance Atomistic Simulation of the Annealing of Ta2O5 Thin Films

Lecture notes in computer science 2026

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Authors: Fedor Vasilievich Grigoriev, Vladimir Borisovich Sulimov, Alexander Vladimirovich Tikhonravov
DOI: 10.1007/978-3-032-13127-0_8
Cited by: 0
References: 24

Fields of Study & Subjects

Optical Coatings and Gratings Semiconductor materials and devices Electronic and Structural Properties of Oxides

Publication details

Journal / source
Lecture notes in computer science
Pages
108–118
Publication date
1 January 2026
Language
EN