Electrical Wafer Sorting: a Deep Learning Approach for Advanced Wafer Defect Map Evaluation

Lecture notes in mechanical engineering 2026

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Authors: Michele Fiore, Alessandro Sitta, Gaetano Sequenzia, Francesco Rundo, Michele Calabretta

DOI: 10.1007/978-3-032-14950-3_15

Cited by: 0

References: 17

Fields of Study & Subjects

Industrial Vision Systems and Defect Detection Integrated Circuits and Semiconductor Failure Analysis Fault Detection and Control Systems

References 17