Modeling of Microfluidic MEMS-Based Capacitive Pressure Measurement

Lecture notes in mechanical engineering 2026 Open access

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Authors: Seçkin Eroğlu, Ayda Önsoy, Çağrı Öztürk, Barbaros Çetin, Ender Yıldırım
DOI: 10.1007/978-3-032-16138-3_1
Cited by: 0
References: 13

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Microfluidic and Capillary Electrophoresis Applications Sensor Technology and Measurement Systems

Publication details

Journal / source
Lecture notes in mechanical engineering
Pages
3–10
Publication date
1 January 2026
Language
EN