Fracture and Fatigue Behavior of Indentation Prefabricated Crack in Monocrystal Silicon

Springer Proceedings in Materials 2026

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Authors: Hongdi Dai, Ping Zhen Zhou, D.M. Guo

DOI: 10.1007/978-981-95-0445-9_6

Cited by: 0

References: 12

Fields of Study & Subjects

Advanced Surface Polishing Techniques Advanced MEMS and NEMS Technologies Advanced ceramic materials synthesis

References 12