The Growth of Doped β_ $${\mathbf{G}\mathbf{a}}_{2}{\mathbf{O}}_{3}$$ Thin Films on Quartz and $${\mathbf{A}\mathbf{l}}_{2}{\mathbf{O}}_{3}$$ Substrates by Using Sol Gel Method
Fields of Study & Subjects
Ga2O3 and related materials
GaN-based semiconductor devices and materials
Semiconductor materials and interfaces
Publication details
- Journal / source
- Lecture notes in electrical engineering
- Pages
- 165–170
- Publication date
- 1 January 2026
- Language
- EN