An Experimental Effort Implemented over CVD TiSiN Thin Film Coating to Improve Mechanical and Corrosion Properties by Annealing
Fields of Study & Subjects
Metal and Thin Film Mechanics
Advanced ceramic materials synthesis
Acoustic Wave Resonator Technologies
Publication details
- Journal / source
- Lecture notes in mechanical engineering
- Pages
- 45–55
- Publication date
- 1 January 2026
- Language
- EN