Multiphysics Coupling Simulation of Inductively Coupled Plasma (ICP): Regulation Mechanism of Coil Power on Temperature Field

Lecture notes in electrical engineering 2026

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Authors: Zengfeng Lin, Binrui Xie, Wentao Yu, Zhou Xu, Lei Liu

DOI: 10.1007/978-981-95-6762-1_49

Cited by: 0

References: 9

Fields of Study & Subjects

Plasma Diagnostics and Applications Vacuum and Plasma Arcs Induction Heating and Inverter Technology

References 9