Micro/nano scale micro-motion platforms for extreme manufacturing: design, development and application

The International Journal of Advanced Manufacturing Technology 2026

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Authors: Wenheng Huang, Guoqing Zhang, Zejiang Xu, Zejia Huang, Rongfei Zou, Mingguo Peng

DOI: 10.1007/s00170-025-17248-2

Cited by: 0

References: 233

Fields of Study & Subjects

Piezoelectric Actuators and Control Advanced Measurement and Metrology Techniques Advanced MEMS and NEMS Technologies

Journal / source: The International Journal of Advanced Manufacturing Technology
Volume: 142
Issue: 7-8
Pages: 3207–3243
Publication date: 13 January 2026
Language: EN

References 233