Theoretical and experimental analysis for the micromorphology and surface roughness evolution of double-sided polished ultra-thin crystal substrates

The International Journal of Advanced Manufacturing Technology 2026

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Authors: Lei Yang, Yufan Jia, Pengju Wang, Jie Chen, Xincheng Xie
DOI: 10.1007/s00170-025-17354-1
Cited by: 0
References: 32

Fields of Study & Subjects

Advanced Surface Polishing Techniques Surface Roughness and Optical Measurements Advanced machining processes and optimization

Publication details

Journal / source
The International Journal of Advanced Manufacturing Technology
Volume
142
Issue
7-8
Pages
3781–3797
Publication date
12 January 2026
Language
EN