Laser micromachining of silicon in pressurized and flowing water
Fields of Study & Subjects
Laser Material Processing Techniques
Advanced Machining and Optimization Techniques
Erosion and Abrasive Machining
Publication details
- Journal / source
- The International Journal of Advanced Manufacturing Technology
- Volume
- 142
- Issue
- 11-12
- Pages
- 6125–6136
- Publication date
- 29 January 2026
- Language
- EN