Structure and inconel 718 cutting of (TiW)N films prepared by reactive sputtering

The International Journal of Advanced Manufacturing Technology 2026

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Authors: Yu-Kai Shen, Tien-Li Chang, Shu-Ping Wu, Ya-Ge Huang, Chun-Yao Hsu
DOI: 10.1007/s00170-026-17605-9
Cited by: 1
References: 34

Fields of Study & Subjects

Metal and Thin Film Mechanics Copper Interconnects and Reliability Metallurgical and Alloy Processes

Publication details

Journal / source
The International Journal of Advanced Manufacturing Technology
Publisher
Springer Science and Business Media LLC
Volume
143
Issue
7-8
Pages
4093–4107
Publication date
3 March 2026
Language
EN