A hybrid isolation forest–DBSCAN framework with entropy-based complexity analysis for precursor radiofrequency instability detection in reactive AlN sputtering

The International Journal of Advanced Manufacturing Technology 2026

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Authors: Hsuan-Fan Chen, Yu-Shin Chen, Cheng-Yuan Kao, Lirong Chen, Yiin‐Kuen Fuh, Tomi Ting-Tung Li
DOI: 10.1007/s00170-026-17849-5
Cited by: 1
References: 43

Fields of Study & Subjects

Metal and Thin Film Mechanics Acoustic Wave Resonator Technologies Plasma Diagnostics and Applications

Publication details

Journal / source
The International Journal of Advanced Manufacturing Technology
Publisher
Springer Science and Business Media LLC
Volume
144
Issue
5-6
Pages
3281–3299
Publication date
16 April 2026
Language
EN