Investigation on anomalous dependence of structure and optical-electrical properties on substrate temperature in RF magnetron sputtered ITO films

Applied Physics A 2026

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Authors: B.L. Zhu, H. W. Wang, F. Liu, X. W. Shi, W. Q. Sun
DOI: 10.1007/s00339-026-09439-9
Cited by: 0
References: 58

Fields of Study & Subjects

Thin-Film Transistor Technologies ZnO doping and properties Metal and Thin Film Mechanics

Publication details

Journal / source
Applied Physics A
Volume
132
Issue
3
Publication date
27 February 2026
Language
EN