High-sensitivity SAW micro-pressure sensor with cantilever beam structure: optimization of IDT and electrode

Microsystem Technologies 2026

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Authors: Zhuoyue Duan, Peng Yin, Tao Wang, Xiaotao Yu, Wei Ji, Jihua Lu, Lihui Feng

DOI: 10.1007/s00542-025-06005-w

Cited by: 0

References: 20

Fields of Study & Subjects

Acoustic Wave Resonator Technologies Advanced MEMS and NEMS Technologies Ultrasonics and Acoustic Wave Propagation

References 20