A review of recent advancements on materials and methods for microelectromechanical system-based devices

Microsystem Technologies 2026

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Authors: Swarnalatha Veerla, Sreejith Vattaparambil Sreedharan, Shuai Ju, Mitali Hardik Desai, Haifeng Zhang
DOI: 10.1007/s00542-025-06008-7
Cited by: 1
References: 159

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Electrical and Thermal Properties of Materials Advanced Sensor and Energy Harvesting Materials

Publication details

Journal / source
Microsystem Technologies
Publisher
Springer Science and Business Media LLC
Volume
32
Issue
3
Publication date
14 February 2026
Language
EN