Advances in MEMS fabrication: a comprehensive review of techniques, trends, and challenges

Microsystem Technologies 2026

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Authors: Adithisri Vishwanath, C. Joshitha, K. Vishwanath, B. S. Sreeja, S. Fouziya Sulthana
DOI: 10.1007/s00542-026-06071-8
Cited by: 1
References: 120

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Advanced Sensor and Energy Harvesting Materials Piezoelectric Actuators and Control

Publication details

Journal / source
Microsystem Technologies
Publisher
Springer Science and Business Media LLC
Volume
32
Issue
8
Publication date
1 July 2026
Language
EN