Design and simulation of a MEMS single proof mass capacitive accelerometer with integral parallel-plate capacitors

Microsystem Technologies 2026 Open access

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Authors: Xinyu Zou, Guijuan Zhao, Zonglin Weng, Guipeng Liu
DOI: 10.1007/s00542-026-06097-y
Cited by: 0
References: 17

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Geophysics and Sensor Technology Sensor Technology and Measurement Systems

Publication details

Journal / source
Microsystem Technologies
Publisher
Springer Science and Business Media LLC
Volume
32
Issue
9
Publication date
15 July 2026
Language
EN