Surface topography reconstruction of highly reflective wafers for in-line inspection via deep learning and Fizeau interferometry

Journal of Intelligent Manufacturing 2026

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Authors: Jurim Jeon, Yangjin Kim, Naohiko Sugita

DOI: 10.1007/s10845-025-02769-0

Cited by: 0

References: 63

Fields of Study & Subjects

Optical measurement and interference techniques Industrial Vision Systems and Defect Detection Surface Roughness and Optical Measurements

References 63