Review of wafer defect detection in semiconductor manufacturing: Algorithms, systems, and data

Journal of Intelligent Manufacturing 2026

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Authors: Jian Li, Xiangyan Zhang, Xuexiu Liang, Gefan Yin, Lutao Yan, Shimin Wei

DOI: 10.1007/s10845-026-02845-z

Cited by: 4

References: 357

Fields of Study & Subjects

Industrial Vision Systems and Defect Detection Advanced Neural Network Applications Advanced Data and IoT Technologies

References 357