Analysis of activation energies in anisotropic wet etching of single-crystal silicon

Journal of Materials Science 2026

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Authors: Guorong Wu, Chen Qian, Jia Sun, Chenghao Ni, Ning Wang, Ming Li, Xiaokang Chen, Xuanrong Gu

DOI: 10.1007/s10853-026-12172-6

Cited by: 0

References: 34

Fields of Study & Subjects

Semiconductor materials and devices Advanced Surface Polishing Techniques Plasma Diagnostics and Applications

References 34