Correlation between microstructural features and sputtering properties of NiV (7 wt.%) targets

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Authors: Jiangchao Xue, Xiaoyi Pu, Hongyan Wang, Linqing Yang, Han Xiao, Ming Wen
Cited by: 1
References: 32

Fields of Study & Subjects

Ion-surface interactions and analysis Metal and Thin Film Mechanics Semiconductor materials and interfaces

Publication details

Journal / source
Journal of Materials Science
Publisher
Springer Science and Business Media LLC
Volume
61
Issue
25
Pages
18264–18278
Publication date
17 May 2026
Language
EN