Correlation between microstructural features and sputtering properties of NiV (7 wt.%) targets
Fields of Study & Subjects
Ion-surface interactions and analysis
Metal and Thin Film Mechanics
Semiconductor materials and interfaces
Publication details
- Journal / source
- Journal of Materials Science
- Publisher
- Springer Science and Business Media LLC
- Volume
- 61
- Issue
- 25
- Pages
- 18264–18278
- Publication date
- 17 May 2026
- Language
- EN