Influence of substrate temperature in RF sputtering on the structural and optoelectronic properties of AZO thin films

Journal of Materials Science Materials in Electronics 2026

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Authors: Tulsiram Madkami, Rahul Rahul, Pratima Agarwal

DOI: 10.1007/s10854-026-17831-7

Cited by: 1

References: 38

Fields of Study & Subjects

ZnO doping and properties Ga2O3 and related materials Gas Sensing Nanomaterials and Sensors

References 38