Multi-physical Numerical Simulation and Design Optimization of a low-temperature Inductively Coupled Plasma Torch for Optical Fabrication

Plasma Chemistry and Plasma Processing 2026

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Authors: Yuepeng Hu, Peiqi Jiao, Peng Zhang, Bin Fan, Qiang Xin, Yupeng He, Deping Yu

DOI: 10.1007/s11090-025-10617-5

Cited by: 0

References: 18

Fields of Study & Subjects

Plasma Diagnostics and Applications Plasma Applications and Diagnostics Vacuum and Plasma Arcs

References 18