Research on Nanoindentation of Single-Crystal Silicon Corners Based on Molecular Dynamics

Journal of Materials Engineering and Performance 2026

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Authors: Chao Long, Jinyi Xia, Ruihan Li, Pengyue Zhao, Ziteng Li, Shuhao Kang, Duo Li, Huan Liu

DOI: 10.1007/s11665-026-13211-8

Cited by: 1

References: 51

Fields of Study & Subjects

Advanced Surface Polishing Techniques Metal and Thin Film Mechanics Nanofabrication and Lithography Techniques

References 51