Optimization of CVD SiC process and preparation of high-purity coatings based on a thermodynamic-fluid dynamics coupled model

Journal of Central South University 2026

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Authors: Zhen-nan Xu, Zhaoke Chen, Rui Shu, Jia-Xiang Xue, Feng-min-yu Xie, Zong-xu Wu, Rong-Kun Yang, Zheng-mao Yang, Xiang Xiong

DOI: 10.1007/s11771-026-6260-z

Cited by: 0

References: 54

Fields of Study & Subjects

Silicon Carbide Semiconductor Technologies Advanced ceramic materials synthesis Advanced Materials and Semiconductor Technologies

References 54