MEMS-based tunable Fabry–Perot filter in near-infrared band with improved cantilever beams

Optoelectronics Letters 2026

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Authors: Jingting Wang, Yufei Jiang, Yu Wang, Kangrui Zhu, Chuanyi Tao

DOI: 10.1007/s11801-026-4183-4

Cited by: 0

References: 9

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators Optical Systems and Laser Technology

References 9