Temperature Effects on Reaction Kinetics of Hydrogenated Amorphous Carbon Deposition in Inductively Coupled C2H2 Plasmas

Korean Journal of Chemical Engineering 2026

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Authors: Jie Li, H.J. Choi, Heeyeop Chae

DOI: 10.1007/s11814-025-00635-6

Cited by: 0

References: 45

Fields of Study & Subjects

Plasma Diagnostics and Applications Diamond and Carbon-based Materials Research Metal and Thin Film Mechanics

References 45