Electromigration Reliability and Failure Mechanisms in Novel 3D Cu Stagger-via Interconnects for Advanced High-Density Fan-Out Packaging
Fields of Study & Subjects
3D IC and TSV technologies
Electronic Packaging and Soldering Technologies
Copper Interconnects and Reliability
Publication details
- Journal / source
- JOM
- Publisher
- Springer Science and Business Media LLC
- Volume
- 78
- Issue
- 6
- Pages
- 5188–5206
- Publication date
- 7 January 2026
- Language
- EN