Unsteady Multiphase CFD Analysis of Slurry Flow in a 300 mm CMP System: Effect of Rotation Speed and Slurry Flow Rate

International Journal of Precision Engineering and Manufacturing 2026

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Authors: Doyun An, Munyoung Hong, Hyun Sung Park, Hong Jin Kim, Hyunki Kim, HYUNSEOP LEE, Jin Lee
DOI: 10.1007/s12541-026-01524-6
Cited by: 1
References: 30

Fields of Study & Subjects

Advanced Surface Polishing Techniques Fluid Dynamics and Thin Films Advanced ceramic materials synthesis

Publication details

Journal / source
International Journal of Precision Engineering and Manufacturing
Publisher
Springer Science and Business Media LLC
Publication date
6 July 2026
Language
EN