Numerical Simulation and Mass Transfer Analysis of Ultrasound-Enhanced Metal-Assisted Chemical Etching for Silicon Nanopore Fabrication

International Journal of Precision Engineering and Manufacturing 2026 Open access

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Authors: Xun Chen, Xuan Zhang, Haoya Wang, Haojun Zhang, Jiecai Long, Guohuai Lin, Huitao Liu, Yun Chen, Xin Chen
DOI: 10.1007/s12541-026-01538-0
Cited by: 0
References: 41

Fields of Study & Subjects

Anodic Oxide Films and Nanostructures Nanofabrication and Lithography Techniques Microfluidic and Bio-sensing Technologies

Publication details

Journal / source
International Journal of Precision Engineering and Manufacturing
Publisher
Springer Science and Business Media LLC
Volume
27
Issue
10
Pages
4247-4261
Publication date
15 June 2026
Language
EN