Influence of Si Content on the Structural, Mechanical, Tribological, and Wettability Properties of Al-Si–N Thin Films
Fields of Study & Subjects
Metal and Thin Film Mechanics
Surface Treatment and Coatings
Tribology and Lubrication Engineering
Publication details
- Journal / source
- Silicon
- Volume
- 18
- Issue
- 6
- Pages
- 2315–2333
- Publication date
- 5 February 2026
- Language
- EN