A Molecular Dynamics Investigation into the Interaction Between Diamond and Silicon Asperities in the Nanofinishing Process
Fields of Study & Subjects
Advanced Surface Polishing Techniques
Diamond and Carbon-based Materials Research
Force Microscopy Techniques and Applications
Publication details
- Journal / source
- Silicon
- Publisher
- Springer Science and Business Media LLC
- Volume
- 18
- Issue
- 10
- Pages
- 3489–3499
- Publication date
- 1 July 2026
- Language
- EN