Development of Extreme Ultraviolet Pellicles Based on Yttrium Core with Amorphous Carbon Capping Layer

Electronic Materials Letters 2026

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Authors: Kihun Seong, Hye‐Young Kim, Yongkyung Kim, Hyeongkeun Kim, Won Jin Kim, Hyeongkeun Kim, Won Jin Kim, Seungchan Moon, Jinho Ahn, Seul-Gi Kim, Hyun-Mi Kim, Hyun-Mi Kim
DOI: 10.1007/s13391-026-00630-x
Cited by: 2
References: 46

Fields of Study & Subjects

Silicon and Solar Cell Technologies Transition Metal Oxide Nanomaterials Thin-Film Transistor Technologies

Publication details

Journal / source
Electronic Materials Letters
Publisher
Springer Science and Business Media LLC
Volume
22
Issue
4
Pages
381–392
Publication date
20 January 2026
Language
EN