Design and optimization of a multipole-corrected mass analyzing magnet for high-current low-energy ion implantation system

Journal of the Korean Physical Society 2026

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Authors: Dong-Hwan Kim, Han-Sung Kim, Hyeok Jung Kwon

DOI: 10.1007/s40042-026-01564-1

Cited by: 0

References: 8

Fields of Study & Subjects

Particle accelerators and beam dynamics Ion-surface interactions and analysis Pulsed Power Technology Applications

References 8