Optimization of the Showerhead for Atomic Layer Deposition by Computational Fluid Dynamics

International Journal of Precision Engineering and Manufacturing-Green Technology 2026

View at publisher
Authors: Seung Hoon Lee, Do Yeong Jung, Dong Kun Song, Hyeon Do Han, Guanghui Min, Da Hye Geum, Jun Geon Park, Seung Wan Bae, Ji Woong Jeon, Hong Sik Kim, Gu Young Cho
DOI: 10.1007/s40684-025-00818-w
Cited by: 0
References: 59

Fields of Study & Subjects

Innovative Microfluidic and Catalytic Techniques Innovation Fluid Dynamics and Thin Films Nuclear reactor physics and engineering

Publication details

Journal / source
International Journal of Precision Engineering and Manufacturing-Green Technology
Volume
13
Issue
3
Pages
1077–1098
Publication date
5 January 2026
Language
EN