Development of an automated linear stage for large area pattern generation embedded with a hot embossing setup

ISSS Journal of Micro and Smart Systems 2026

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Authors: Subir Datta, Arjyajyoti Goswami

DOI: 10.1007/s41683-025-00146-w

Cited by: 0

References: 13

Fields of Study & Subjects

Advanced Measurement and Metrology Techniques Engineering Technology and Methodologies Nanofabrication and Lithography Techniques

References 13