Micro-level automatic leveling system based on machine vision for graphite flakes transfer

Abstract In micro-scale manufacturing and transfer processes, achieving precise leveling is critical but hindered by the limitations of existing methods. Conventional leveling approaches—ranging from labor-intensive manual procedures to bulky, slow, and complex automated stages—fail to deliver the necessary precision and efficiency for delicate tasks. These shortcomings are particularly evident in applications such as the batch transfer of graphite flakes for self superlubricity research, where sub-micrometer coplanarity is essential. In this study, we present a high-precision automatic leveling system that utilizes machine vision and Moiré fringe patterns to accurately measure and correct tilt angles in real-time. A dedicated mathematical model resolves the phase ambiguity inherent in periodic fringes, enabling rapid and precise angle calculation. Simulations and experiments demonstrate that the system achieves a leveling precision of 0.01° within 10 seconds. By employing gratings with a smaller period and a higher-magnification microscope, the theoretical angular resolution of the proposed method can attain 0.0001°. This compact, non-contact solution not only significantly enhances the efficiency and reliability of graphite flakes transfer but also provides a robust leveling tool for various micro-scale applications.