Organic Modification of Inorganic Surfaces for Atomic Layer Etching Applications

Elsevier eBooks 2026 Book chapter

View at publisher
Authors: Marissa D. Pina, Andrew V. Teplyakov
DOI: 10.1016/b978-0-443-27509-8.00010-3
Cited by: 0
References: 43

Fields of Study & Subjects

Semiconductor materials and devices Nanofabrication and Lithography Techniques Advancements in Photolithography Techniques

Publication details

Journal / source
Elsevier eBooks
Publication date
1 January 2026
Language
EN
Document type
Book chapter