Anisotropic deformation and material removal mechanisms of p-type 4H-SiC

Acta Materialia 2026

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Authors: Yanwei Yang, Shuai Liu, Lijun Ma, Mengying Zhu, Xinyi Wang, Chen Yang, Bing-Feng Ju, Chaoqun Dang

DOI: 10.1016/j.actamat.2026.122503

Cited by: 1

References: 59

Fields of Study & Subjects

Silicon Carbide Semiconductor Technologies Advanced ceramic materials synthesis Boron and Carbon Nanomaterials Research

References 59