Reduced-order driven improved EnKF method for online estimation of time-varying convective heat transfer coefficient and temperature field in lithography masks

Applied Thermal Engineering 2026

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Authors: Yuheng Zhang, Hao Long, Xia Yang, Chaohui Huang, Weizhe Wang, Yingzheng Liu

DOI: 10.1016/j.applthermaleng.2026.131272

Cited by: 1

References: 36

Fields of Study & Subjects

Advancements in Photolithography Techniques Radiative Heat Transfer Studies Epoxy Resin Curing Processes

References 36