Enhancing mobility and interface state engineering via UV-ozone treatment in BEOL-compatible ultrathin TiO2 transistors

Applied Surface Science 2026

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Authors: Chandan Samanta, Elia Palmese, Yuping Zeng

DOI: 10.1016/j.apsusc.2026.165831

Cited by: 0

References: 33

Fields of Study & Subjects

Thin-Film Transistor Technologies Semiconductor materials and devices Ga2O3 and related materials

References 33