Amorphous C:Ti nanocomposite films: modulating optical and electronic properties by a hybrid PECVD/sputtering process

Applied Surface Science 2026

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Authors: Junjiang Lin, Jingwen Nan, Erlin Wang, Hui Liu, Liyu Lin

DOI: 10.1016/j.apsusc.2026.165952

Cited by: 0

References: 64

Fields of Study & Subjects

Diamond and Carbon-based Materials Research Metal and Thin Film Mechanics Thin-Film Transistor Technologies

References 64